• Title, Summary, Keyword: Micro Fabrication

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A Study on the Micro Tool Fabrication using Electrolytic In-process Dressing (전해 연속 드레싱을 이용한 마이크로 공구 제작)

  • 이현우;최헌종;이석우;최재영;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.12
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    • pp.171-178
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    • 2002
  • With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools (WC) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID (Electrolytic In-process Dressing) technique and the micro tools are fabricated as square shape with the dimension less than 100${\mu}{\textrm}{m}$. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro tools are fully applicable to micro grooving, micro drilling and free form cutting.

Data Acquisition of Thin-wall Injection Molding Cavity with Micro Pattern (미세 패턴을 가진 박판 사출 성형에서의 금형내 압력 온도 측정 및 분석)

  • Hwang E.J.;Yoo Y.E.;Jae T.J.;Choi D.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1601-1604
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    • 2005
  • The demand increasing of optical applications like as display devices derives interest for fabrication process. The product s development is apt to fabricate numerous thin and wide surfaces with micro pattern. Naturally that needs injection molding fabrication for the mass production. In existing manufacturing, the product quality is controlled by input fabrication condition from the outside. That can be called as a try and error method and not fundamentally solve the troubles; imperfect replication, war page, short shot, etc. To understand the cause and bring a solution, it is needed that check of changing in the cavity. This study can catch them. Data acquisition system about temperature and pressure distribution is settled and can get some data. From this research, other studies related with DAQ in cavity can start on the easier step.

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Analysis of Micro Injection Molding Process for Polymeric Microneedle Fabrication (플라스틱 마이크로니들의 미세사출성형공정에 대한해석)

  • Lee S. H.;Kang J. J.;Heo Y. M.;Jung T. S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • pp.55-59
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    • 2005
  • Micro injection molding analysis for microneedle fabrication was performed in the present study. The dimensions of width and thickness for microneedle are 600um, 500um, respectively. A delivery system based on guidelines for traditional injection molding was designed for four-cavities molding system. To investigate the effects of processing conditions in the mirconeedle fabrication, injection molding analysis using commercial code was performed. It was shown that the total injection time has a significant effect on the fabrication of microneedles.

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Miniaturization of Polymerase Chain Reaction

  • Lee, Ji-Youn;Kim, Jae-Jeong;Park, Tai-Hyun
    • Biotechnology and Bioprocess Engineering:BBE
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    • v.8 no.4
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    • pp.213-220
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    • 2003
  • Polymerase chain reaction (PCR) is one of the most widely used analytical tool and is an important module that would benefit from being miniaturized and integrated onto diagnostic or analytical chips. There are potentially two different approaches for the miniaturization of the PCR module: chamber-type and flow-type micro-PCR. These miniaturized PCRs have distinct characteristics and advantages. In this article, we review the necessity of micro-PCR, the materials for the chip fabrication, the surface modification, and characteristics of the two types of micro-PCR. The motivation underlying the development of micro-PCR, the advantages and disadvantages of the various materials used in fabrication and the surface modification methods will be discussed. And finally, the precise features of the two different types of micro-PCR will be compared.

Fabrication of 3D structures using micro-stereolithography technology (극소 광 조형기술을 이용한 3차원 구조물의 제작)

  • 이인환;조동우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1080-1083
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    • 1997
  • Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

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Fabrication of Micro-fluidic Channels using a Flexible and Rapid Surface Micro-machining Technique (유연하고 신속한 표면미세가공기술을 이용한 Micro-fluidic Channel 제작)

  • 김진산;성인하;김대은
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • pp.603-607
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    • 2002
  • Recently, the need leer transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to fabricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro- fabrication technique and microsystem packaging method described in this work.

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The Fabrication of Micro Actuator Used Micro Electro-Magnet and Magnetostrictive Thin Film (마이크로 전자석과 자기변형박막을 이용한 마이크로 엑추에이터의 제작)

  • Seo, Jee-Hoon;Yang, Sang-Sik;Jeong, Jong-Man;Lim, Sang-Ho
    • Proceedings of the KIEE Conference
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    • pp.3328-3330
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    • 1999
  • In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

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Formation of an Aluminum Parting Layer in the Fabrication of Field Emitter Arrays Using Reflow Method

  • Kang, Seung-Youl;Jung, Moon-Youn;Cho, Young-Rae;Song, Yoon-Ho;Lee, Sang-Kyun;Kim, Do-Hyung;Lee, Jin-Ho;Cho, Kyoung-Ik
    • 한국정보디스플레이학회:학술대회논문집
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    • pp.219-220
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    • 2000
  • We propose a new method for the formation of an aluminum parting layer in the fabrication of field emitter arrays, in which we used a reflow property of aluminum at a lower temperature than the deformation point of glass. After the sputtered aluminum layer on the gate metal was etched for the formation of gate holes, we carried out a rapid thermal annealing process, by which the aluminum slightly diffused into the gate hole. This reflowed aluminum could be used as a parting layer and emitter arrays were easily fabricated using this method.

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Low-Loss Polymeric Waveguides Having Large Cores Fabricated by Hot Embossing and Micro-contact Printing Techniques

  • Yoon, Keun Byoung
    • Macromolecular research
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    • v.12 no.5
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    • pp.474-477
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    • 2004
  • We present simple, low-cost methods for the fabrication of polymeric waveguides that have large core sizes for use as optical interconnects. We have used both hot embossing and micro-contact printing techniques for the fabrication of multimode waveguides using the same materials. Rectangular and large-core (60${\times}$60 $\mu\textrm{m}$$^2$) channels were readily prepared when using these methods. The dimensions of the embossed and printed channels were the same as those of the pattern on the original master. The polymeric waveguides that we fabricated with large core sizes exhibited a low propagation loss of 0.1 dB/cm at 850 nm, which indicates that hot embossing and micro-contact printing are suitable techniques for the fabrication of optical waveguides having large-core.

Fabrication of the multi-layer structure and Nickel mold with electroforming using KMPR (KMPR을 이용한 다층구조물 제작 및 전해도금을 이용한 니켈몰드 제작)

  • Hwang Sung-Jin;Jung Phill-Gu;Ko Jeung-Sang;Ko Jong-Soo;Jeong Im-Deok;Kim In-Gon
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.143-144
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    • 2006
  • In this paper, we proposed XP KMPR-1050 negative tone resist to replace SU-8 resist for multi-layer micro-structures and thick plating mold fabrication using UV-LIGA process. XP KMPR resist proposed in this paper can be easily striped using a common stripping solution such as NMP without damage of micro-structure. The conditions for the fabrication of XP KMPR micro-structure were optimized by adjustment of exposure and post-exposure bake(PEB). The $140{\mu}m$ -thick and an aspect ratio at least 10 micro-structure and multi-layer structures were successfully fabricated through the process conditions. Through-mold electroplating and PR striping of XP KMPR has been successfully demonstrated.

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