• Title, Summary, Keyword: Micro Fabrication

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Fabrication and Testing of Glass Bipolar Plates for Application on Micro PEM Fuel Cells (마이크로 연료 전지를 위한 유리 바이폴라 플레이트의 제작 방법 및 성능 평가)

  • Jang, Bo-Sun;Lee, Jong-Kwang;Kwon, Se-Jin
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • pp.289-292
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    • 2009
  • The fabrication method of glass bipolar plates for micro PEM fuel cell application has been established and performance evaluation has been carried out. The advantages of glass bipolar plates for micro PEM fuel cells are light weight, high chemical resistivity, and easy manufacture. The MEMS fabrication process of anisotropic wet etching, thermal & UV bonding along with metal layer deposition has been introduced. From performance evaluation, it was shown that the micro fuel cell with a metal layer deposited on the reactive area yielded higher power density than the one without it. But both power densities of the two cases showed out to be adequate with the current status of micro fuel cell technology.

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Development of fundamental technologies on high precision mold for micro functional elements and parts (기능성 초정밀 핵심 요소부품 제조 초정밀 금형 기반기술 개발)

  • Je, T.J.;Lee, E.S.;Choi, D.S.;Kim, J.G.;Whang, K.H.;Yoon, J.S.;Chang, S.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • pp.74-77
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    • 2009
  • Demands for high quality and productivity of precision mechanical parts are increasing greatly nowadays due to the rapid growth of information technologies and convergence industries. Therefore, core technologies for fabrication of precision mechanical parts are the fundamental issues, which are the precision machining, micro powder injection molding technologies, MR polishing, micro polymer processes, micro actuation modules and so on. These technologies are directly related to the mass production of high functional devices and machineries. Therefore, this study investigates the fabrication technologies of micro precision molds for advanced devices for possible commercialization in a near future.

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Fabrication of Micro Carbon Structures and Patterns with Laser-assisted Chemical Vapor Deposition (레이저 국소증착을 통한 미세 탄소구조물 및 패턴 제조)

  • 정성호;김진범;이선규;이종현
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.914-917
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    • 2002
  • Fabrication of micro carbon structures and patterns using laser-assisted chemical vapor deposition is studied. Argon ion laser and ethylene were used to grow micro carbon rod through pyrolytic decomposition of the reaction gas. The influence of reaction gas pressure and incident laser power on the diameter and growth rate of the micro carbon rod was experimentally investigated. The diameter of micro carbon rods increases linearly with respect to the laser power but is almost independent of the reaction gas pressure. Growth rate of the rod changes little with gas pressure when the laser power remains below 1W. When the carbon rod was grown at near threshold laser power, a very smooth surface is obtained on the rod. By continuously moving the focusing lens in the direction of growth, a micro carbon rod with a diameter of 28 ${\mu}{\textrm}{m}$ and aspect ratio of 100 was fabricated.

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Micro-lens Patterned LGP Injection Mold Fabrication by LIGA-reflow Process (LIGA-reflow 응용 Micro-lens Pattern 도광판 금형 제작)

  • Hwang C.J.;Kim J.D.;Chung J.W.;Ha S.Y.;Lee K.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • pp.241-244
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    • 2004
  • Microlens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LCP optical design, microlens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. In order to achieve flow balance during the micro-injection molding process and dimensional accuracy, two LGP pattern was made in one micro-mold.

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Fabrication of 3D Micro Structure Using Micro Electrical Discharge Milling (마이크로 방전 밀링을 이용한 미세 구조물 제작)

  • 이병욱;이상민;김보현;주종남
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.9
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    • pp.41-47
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    • 2004
  • As mechanical structures are minimized, the demand on micro dies and molds has increased. Machining complex 3D shapes requires fabrication procedures for preparing the electrodes. Micro electrical discharge milling using a simple shape electrode can produce 3D micro structure. In this paper the machining characteristics of micro electrical discharge milling according to depth of cut and capacitance are investigated. The machining time is diminished when simple tool-paths and algorithms for changing the feedrate are applied. But a distorted bottom shape and a tapered wall shape are inevitable after machining. The distorted bottom shape and the taper angle of wall are reduced by finish machining.

Development of a Hot-Embossing Process using Ceramic Glass Molds for Polymer Micro Structures (글라스 주형을 이용한 폴리머 미세 형상 핫-엠보싱 공정 연구)

  • Kim, Joo-Han;Shin, Ki-Hoon
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.6
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    • pp.168-174
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    • 2007
  • A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.

Fabrication of Micro-channels for Wave-Micropump Using Stereolithography and UV Photolithography (광조형법과 UV 포토리소그래피를 이용한 웨이브 마이크로펌프 미세 채널 제작)

  • Loh, Byoung-Gook;Kim, Woo-Sik;Shim, Kwang-Bo
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.12
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    • pp.128-135
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    • 2007
  • Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

Fabrication of Micro Tool Electrode for Machining Micro Structures using Wire Electrical Discharge Grinding(WEDG) (WEDG 방법을 이용한 마이크로 구조물 가공용 미세공구 제작)

  • Park Sung-Jun;Ahn Hyun-Min;Lee Kyo-Seung
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.14 no.5
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    • pp.13-20
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    • 2005
  • Micro EDM process is generally used for machining microholes, cavities, and three dimensional shapes. For machining micro structures, first of all, micro tool electrode is indispensable and WEDG system is proposed for tool fabrication method. When using WEDG, its machining characteristics are highly affected by many EDM parameters such as applied voltage, current, rotation speed, capacitance, and pulse duration. Therefore, the design of experiment is introduced to fully understand the effect of the EDM parameters on machining tool electrode. And an attempt has been made to develop the mathematical model for predicting the size of the tool electrode by calculating spark distance. The suggested model was verified with experiment and predicted working gap distance is in good accord with the measured value.