• Title/Summary/Keyword: Microactuator

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Design of a Magnetostrictive MicroActuator (자기변형 마이크로 작동기의 설계)

  • 김도연;박영우;임민철
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.5
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    • pp.174-181
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    • 2004
  • This paper presents the development of a magnetostrictive microactuator. The structural and functional requirements are as follows: it must be a millimeter structure and must achieve controllable displacement with nanometer resolution. Finite Element Analysis(FEA) is used to determine the structure with the most uniform and highest magnetic flux density along the Terfenol-D rod. The microactuator prototype 1 is designed and made based on the FEA. It is observed that the microactuator show some level of hysteresis and that it produces 25 newton in force and 3 ${\mu}{\textrm}{m}$ in displacement with 1.5 amperes of current, and resolution of 250 nm per 0.1 amperes. To improve the performance of the microactuator prototype 1, microactuator prototype 2 is made again with a permanent magnet (PM). It is observed that the microactuator prototype 2 gene.ates 3.3 ${\mu}{\textrm}{m}$ in displacement with 0.9 amperes of current. It means that the microactuator prototype 2 performs better than the microactuator prototype 1.

Dynamic Characterizations of a MEMS Microactuator for High Density Hard Disk Drive (고밀도 HDD 용 MEMS 마이크로 액추에이터의 동적 해석)

  • 김철순;전종업;정성환;최재준;민동기;김영훈
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • pp.917-923
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    • 2001
  • This paper presents the fabrication and testing results of a dual stage microactuator system for fine positioning of magnetic heads in hard disk drives. An electrostatic rotary microactuator was newly designed and fabricated. The microactuator was integrated into the head gimbal assembly of a disk drive system and its dynamic characteristics were investigated. Experimental results show that natural frequency and voltage gain of the microactuator are 4.3 KHz and 25 nm/V and the dual stage microactuator system achieves the tracking accuracy of 30 nm.

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Position Control of Electrostatic Microactuator (정전형 마이크로 액튜에이터의 정밀위치제어)

  • 김승한;성우경;이효정
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1063-1066
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    • 1995
  • This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.

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Electromagnetic Microactuators with the Electroplated Planar Coil Driven by Radial Magnetic Field (방사형 자기장 내의 전기도금된 평면코일을 이용한 전자기형 마이크로 액추에이터)

  • Ryu, Ji-Cheol;Gang, Tae-Gu;Jo, Yeong-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.1
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    • pp.16-24
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    • 2001
  • This paper presents an electromagnetic microactuator using the copper coil electroplated on the p+silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial direction, we propose a new actuator structure with twin magnets. The microactuator field in the radial direction, we propose a new actuator structure with twin magnets. The microactator shows a values of resonant frequency and quality factor in the ranges of 10.51${\pm}$0.22kHz and 46.6${\pm}$3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4$\mu\textrm{m}$ for the AC rms current of 26.8mA, showing 2.4 times larger amplitude than the single magnet microactuator.

Fabrication of Thermally-Driven Polysilicon Microactuator and Its Characterization (열구동형 폴리실리콘 마이크로 액츄에이터의 제작 및 특성분석)

  • Lee, J.H.;Lee, C.S.;Yoo, H.J.
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.12
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    • pp.153-159
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    • 1997
  • A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH$_{3}$OH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

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A thermoelastic microactuator with planar latch-up operation (Latch-up 특성을 갖는 평면형의 열구동 마이크로 액츄에이터)

  • 이종현;권호남;전진철;이선규;이명래;장원익;최창억;김윤태
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.865-868
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    • 2001
  • We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12$\mu\textrm{m}$-thick polysilicon, and the sacrificial layer is LTO(Low Temperature Oxide) of 3$\mu\textrm{m}$thickness. The displacement of actuator is as large as 3$\mu\textrm{m}$when the length of actuation bar is 100$\mu\textrm{m}$in length at 5V input voltage. The proposed microactuators have advantages of easy assembly with other optical component by way of fiber alignment in the substrate plane, and its fabrication process features simplicity while retaining batch-fabrication economy.

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Laterally-Driven Electrostatic Repulsive-Force Microactuator (수평구동형 정전반발력 마이크로액추에이터)

  • Lee, Gi-Bang;Jo, Yeong-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.3
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    • pp.424-433
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    • 2001
  • We present a new electrostatic repulsive-force microactuator using a lateral repulsive force induced by an asymmetric distribution of electrostatic field. The lateral repulsive force has been characterized by a simple analytical equation, derived from a finite element simulation. A set of repulsive force polysilicon microactuators has been designed and fabricated by a 4-mask surface-micromachining process. Static and dynamic micromechanical behavior of the fabricated microactuators has been measured at the atmospheric pressure for a varying bias voltage. The static displacement of the fabricated microactuator, proportional to the square of the DC bias voltage, is obtained as 1.27 $\mu\textrm{m}$ for the DC bias voltage of 140V. The resonant frequency of the repulsive-force microactuator increases from 11.7 kHz to 12.7 kHz when the DC bias voltage increases from 60V to 140V. The measured quality-factor varies from 12 to 13 for the bias volatge range of 60V∼140V. The characteristics of the electrostatic repulsive-force have been discussed and compared and compared with those of the conventional electrostatic attractive-force.

Numerical analysis of liquid flow characteristics according to the design parameters of a bubble jet microactuator (마이크로 엑츄에이터의 설계변수에 따른 유동특성 해석)

  • Ko, Sang-Cheol
    • Journal of Advanced Marine Engineering and Technology
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    • v.40 no.7
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    • pp.605-612
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    • 2016
  • A numerical analysis was performed on the effect of the design parameters of a bubble jet type microactuator on its liquid flow characteristics. The numerical models included the ink flow from the reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of the refilling process. Because the bubble behavior is a very important parameter for the overall actuator performance, the bubble growth and collapse phenomena in an open pool were simulated in the present study. The drop ejection and refill process were numerically predicted for various geometries of the nozzle, chamber, and restrictor of the bubble jet microactuator. The numerical results from varying the design parameters can help with predicting the performance and optimizing the design of a microactuator.

Air Damping Evaluation for Laterally Driven Electrostatic Repulsive-Force Microactuators Using Creeping Flow Model (수평 구동형 정전 반발력 마이크로엑추에이터의 Creeping 유동 모델에 의한 공기 감쇠)

  • Lee, Gi-Bang;Seo, Yeong-Ho;Jo, Yeong-Ho
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.11
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    • pp.581-588
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    • 2001
  • This paper presents theoretical and experimental study on the quality-factor of the laterally oscillated electrostatic microactuator, driven by a lateral repulsive-force generated by the asymmetry of planar electric field. The quality-factor of the repulsive-force microactuator using a creeping flow model of the ambient air is evaluated. By filling the simulation results of damping force, we evaluate the dimensionless damping force, $\alpha$, thereby obtaining an analytical damping force, F, in the form of $F=\mu\; \alphaUL,\; where\; \mu,$ U and L denote the air viscosity, the velocity and the characteristic length of the movable electrodes. The measured quality-factor increases from 12 to 13 for the DC bias voltage increased from 60V to 140v. The theoretical quality-factor estimated from the creeping flow model increases from 14.9 to 18.7. Characteristics of quality-factor of the repulsive-force microactuator have been discussed and compared with those of the conventional attractive-force microactuator.

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