• Title, Summary, Keyword: Microwave Radiation

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Microwave Annealing을 이용한 MOS Capacitor의 특성 개선

  • Jo, Gwang-Won;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.241.1-241.1
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    • 2013
  • 최근 고집적화된 금속-산화막 반도체 metal oxide semiconductor (MOS) 소자는 크기가 점점 작아짐에 따라 얇은 산화막과 다양한 High-K 물질과 전극에 대하여 연구되고 있다. 이러한 소자의 열적 안정성과 균일성을 얻기 위해 다양한 열처리 방법이 사용되고 있으며, 일반적인 열처리 방법으로는 conventional thermal annealing (CTA)과 rapid thermal annealing (RTA)이 많이 이용되고 있다. 본 실험에서는 microwave radiation에 의한 열처리로 소자의 특성을 개선시킬 수 있다는 사실을 확인하였고, 상대적으로 $100^{\circ}C$ 이하의 저온에서도 공정이 이루어지기 때문에 열에 의한 소자 특성의 열화를 억제할 수 있으며, 또한 짧은 처리 시간 및 공정의 단순화로 비용을 효과적으로 절감할 수 있다. 본 실험에서는 metal-oxide-silicon (MOS) 구조의 capacitor를 제작한 다음, 기존의 CTA나 RTA 처리가 아닌 microwave radiation을 실시하여 MOS capacitor의 전기적인 특성에 미치는 microwave radiation 효과를 평가하였다. 본 실험은 p-type Si 기판에 wet oxidation으로 300 nm 성장된 SiO2 산화막 위에 titanium/aluminium (Ti/Al) 금속 전극을 E-beam evaporator로 형성하여 capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 평가하였다. 그 결과, microwave 처리를 통해 flat band voltage와 hysteresis 등이 개선되는 것을 확인하였고, microwave radiation 파워와 처리 시간을 최적화하였다. 또한 일반적인 CTA 열처리 소자와 비교하여 유사한 전기적 특성을 확인하였다. 이와 같은 microwave radiation 처리는 매우 낮은 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA나 RTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 산화막과 실리콘 기판의 계면 특성 개선에 매우 효과적이라는 것을 나타낸다. 따라서, microwave radiation 처리는 향후 저온공정을 요구하는 nano-scale MOSFET의 제작 및 저온 공정이 필수적인 display 소자 제작의 해결책으로 기대한다.

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Characteristics of the Contact Angle Using the Microwave Plasma Treatment on Scintillator Panel Substrates (마이크로웨이브 플라즈마 처리를 통한 섬광체 패널 기판의 접촉가 특성변화)

  • Kim, Byoungwook;Kim, Youngju;Ryu, Cheolwoo;Choi, Byoungjung;Kwon, Youngman;Lee, Youngchoon;Kim, Myungsoo;Cho, Gyuseong
    • Journal of Radiation Industry
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    • v.8 no.1
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    • pp.43-47
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    • 2014
  • By measuring decrease change of the contact angle after microwave plasma treatment on the glass and Al as a scintillator panel sample substrate, the adhesive performance of scintillator panel can be expected to improve. Also resolution and sensitivity of scintillator panel after microwave plasma treatment can be expected to maintain highly.

RABBIT HEATING BY MICROWAVE EXPOSURE AT VARIOUS AMBIENT TEMPERATURES

  • Kolganova, Olga I.;Zhavoronkov, Leonid P.;Petin, Vladislav G.;Kim, Jin-Kyu
    • Journal of Radiation Protection and Research
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    • v.35 no.3
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    • pp.99-104
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    • 2010
  • The potential ability of environmental temperature to enhance the effect of microwave radiation (7 GHz) was experimentally studied for rabbit heating after simultaneous application of both agents. The tested ambient temperatures (30 and $38^{\circ}C$) didn't exert a considerable influence upon rabbit heat homeostasis after the used duration of exposure (3 hours and 15 minutes, correspondingly). The synergistic interaction of microwave irradiation and ambient temperature was demonstrated for rabbit heating. Power flux density of microwave irradiation was shown to be a determinant of the synergistic interaction effectiveness. For the fixed ambient temperature ($30^{\circ}C$), the synergism was shown to be observed only within a definite power flux density ($0-100\;mW{\cdot}cm^{-2}$), inside of which there was an optimal intensity ($20\;mW{\cdot}cm^{-2}$), which maximized the synergistic effect. Any deviation of the power flux density from the optimal value resulted in a reduction of the synergy. It is concluded that any assessment of the health or environmental risks should take into account the synergistic interaction between ambient temperature and microwave radiation.

The Characteristics of TPH Removals by Microwave Radiation for Diesel Contaminated Soil (디젤오염토양 마이크로파 처리 시 TPH의 제거 특성)

  • Jeong, Seung-Woo;Lee, Tae-Jin
    • Journal of Korean Society of Environmental Engineers
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    • v.35 no.11
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    • pp.776-780
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    • 2013
  • TPH degrdation patterns in diesel contaminated soil was investigated with microwave radiation. When microwave radiation on the soil was applied, temperature increment of the aridic soil was quite low, but temperature in the moist soil was dramatically increased even if short period of running time. Up to 20% of the moisture content, the higher moisture content has more increment of temperature, whereas over 20% of the moisture content, temperature in the soil was rather decreased. when 100~700 W power of microwave radiation was applied into the contaminated soil, a lot of TPH removals was observed under 300 W, but negligible increment of TPH removal was detected over 300 W. 60% of TPH removal was achieved with initial 20% moisture content and microwave radiation. Additional 25% removal was accomplished when moisture content was kept constant during radiation period. It indicated that maintaining of constant moisture is an important factor for TPH removal with microwave radiation because moisture and temperature in the soil are decreased with reaction time.

A Study on a Human Body Detection Sensor Using Microwave Radiometer Technologies (마이크로파 라디오미터 기술을 응용한 인체 감지 센서에 관한 연구)

  • Son, Hong-Min;Park, Hong-Kyun
    • The Journal of the Korea institute of electronic communication sciences
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    • v.10 no.3
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    • pp.333-340
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    • 2015
  • In this paper, we propose a passive microwave sensor for detecting human body using microwave radiometer technologies. The proposed sensor detects human body by measuring the change of the received radiation power from fixed background object due to human body. A C-band microwave radiometer is designed and implemented. The received radiation power changes due to human body is measured by the C-band microwave radiometer, and the effectiveness of the proposed sensor is evaluated by the measurement result analysis.

Ammonia Nitrogen Removal and Recovery from Swine Wastewater by Microwave Radiation

  • La, Joohee;Kim, Taeyoung;Jang, Jae Kyung;Chang, In Seop
    • Environmental Engineering Research
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    • v.19 no.4
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    • pp.381-385
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    • 2014
  • Microwave (MW) radiation was developed to remove and recover ammonia nitrogen in the real swine wastewater. The effect of operating parameters of MW radiation such as initial pH, power, radiation time, aeration, and stirring for removal ammonia nitrogen in swine wastewater was determined. The pH, radiation time, and power were significantly influenced on the removal of ammonia nitrogen, and aeration and stirring showed relatively minor effect on the removal of ammonia nitrogen. Optimum condition was achieved to retrieve the nitrogen efficiently at pH 11, 700 W for 5 min in MW radiation process. Through this process, 83.1% of ammonia nitrogen concentration was reduced in swine wastewater and also 82.6% of ammonia nitrogen was recovered as ammonium sulfate at the optimized condition. The high ammonia removal and recovery efficiency of the MW radiation method indicated that MW radiation was an effective technique to remove and recover ammonia nitrogen in the swine wastewater.

Electrochemical Characteristics of the Activated Carbon Electrode Modified with the Microwave Radiation in the Electric Double Layer Capacitor (전기이중층캐패시터에서 마이크로파에 의해 개질된 활성탄소전극의 전기화학적 특성)

  • Sun, Jin-Kyu;Um, Eui-Heum;Lee, Chul-Tae
    • Applied Chemistry for Engineering
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    • v.21 no.1
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    • pp.11-17
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    • 2010
  • Modifying surface of activated carbon for the electrode of EDLC with an organic electrolyte was investigated to improve the electrochemical performance of EDLC by the microwave radiation. Three kinds of activated carbons, prepared activated carbon from petroleum cokes and pitch cokes and commercial activated carbon BP-25, were used for this study. For all investigated activated carbons, hydrophilic functional groups-containing oxygen disappeared from the surface of activated carbon as microwave radiation. And as microwave radiation time was increased, the specific surface area and total pore volume of activated carbons were reduced and average pore diameter were increased. From theses effects, interfacial resistance of EDLC with the modified activated carbon electrode was drastically decreased, and discharge capacitance was increased although the specific surface area of activated carbon was reduced by this microwave radiation.

Microwave Dielectric Absorption Spectroscopy Aiming at Novel Dosimetry Using DNAs

  • Izumi, Yoshinobu;Hirayama, Makoto;Matuo, Youichirou;Sunagawa, Takeyoshi
    • Journal of Radiation Protection and Research
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    • v.42 no.1
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    • pp.21-25
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    • 2017
  • Background: We are developing L-band and S-band microwave dielectric absorption systems aiming novel dosimetry using DNAs, such as plasmid DNA and genomic DNA, and microwave technology. Materials and Methods: Each system is composed of a cavity resonator, analog signal generator, circulator, power meter, and oscilloscope. Since the cavity resonator is sensitive to temperature change, we have made great efforts to prevent the fluctuation of temperature. We have developed software for controlling and measurement. Results and Discussion: By using this system, we can measure the resonance frequency, f, and ${\Delta}Q$ (Q is a dimensionless parameter that describes how under-damped an oscillator or resonator is, and characterizes a resonator's bandwidth relative to its center frequency) within about 3 minutes with high accuracy. Conclusion: This system will be expected to be applicable to DNAs evaluations and to novel dosimetric system.

Thermal Inactivation of Salmonella enteritidis, Salmonella typhimurium and E. coli O111 in Liquid Cultures During Microwave Radiation (Microwave 조사에 의한 Salmonella enteritidis, Salmonella typhimurium 과 E. coli의 불활성에 관한 연구)

  • 이조윤;이강욱;배형철;김종우
    • Food Science of Animal Resources
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    • v.18 no.3
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    • pp.269-275
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    • 1998
  • The purpose of this study was to determine the thermal inactivation of Salmonella enteritidis, Salmonella typhimurium and E. coli O111 in liquid cultures treated with microwave energy. Furthermore, this study was to introduce new methodologies for studying nonthermal microwave effects on microorganisms, using controlled microwave energy and specially designed apparatuses. For the automatic temperature control during microwave heating, the real time data acquisition and computation system is designed with BASIC routine. The automatic temperature control system used in the experiments perform relatively stable control at the experiment temperature of 45, 50, 55 60$^{\circ}C$ and 65$^{\circ}C$ for 30 minutes. The effects of microwave heating on liquid cultures was compared with that of conventional heating, still reduces effectively the number of pathogenic bacteria in liquid cultures. While no particular differences between microwave heating and conventional heating was observed in the activation of E. coli at 45$^{\circ}C$ test, the activation of Sal. enteritidis and Sal. typhimurium was slightly reduced during the microwave treatments.

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Clinical Applications of Microwave and Ultrasound in Hyperthermia: Preliminary Results (극초단파와 초음파온열치료에 의한 각종암의 임상치료)

  • Koh Kyoung Hwan;Park Young Hwan;Cho Chul Koo;Yoo Seong Yul
    • Radiation Oncology Journal
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    • v.6 no.1
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    • pp.75-80
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    • 1988
  • Twenty seven lesions of 25 patients with locally advanced malignant tumors were treated with combined hyperthermia introduced by microwave and ultrasound and radiotherapy. Most of all patients were failed with previous conventional therapeutic trial. Hyperthermia had been done immediately after radiotherapy, twice a week, $43^{\circ}C$ for one hour and radiotherapy had been done 5 fractions per week with fraction size of 2Gy upto 30 to 60Gy. Conclusions are as follows. 1. Total response rate (PR+PR) to thermoradiotherapy with microwave and ultrasound was $81\%$. 2. Tumor depth, minimum temperature of tumor center, number of heat fraction and radiation dose were statistically significant factors affecting response. 3. Hyperthermia with microwave and ultrasound can be used efficiently to control locally advanced malignant disease whether previously received near tolerance dose of radiotherapy or not.

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