• Title, Summary, Keyword: PCOVD

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Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

  • Ahn, SeongDeok;Kang, Seong Youl;Oh, Ji Young;Suh, Kyung Soo;Cho, Kyoung Ik;Koo, Jae Bon
    • ETRI Journal
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    • v.34 no.6
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    • pp.970-973
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    • 2012
  • In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are $0.1cm^2/Vs$ and $10^6$, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.