• 제목/요약/키워드: Scanning Electron Microscope

검색결과 2,916건 처리시간 0.222초

열전자형 주사전자현미경 결상특성의 수치해석 (Numerical Analysis for the Image Evaluation of a Thermionic SEM)

  • 정현우;박만진;김동환;장동영;박근
    • 한국공작기계학회논문집
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    • 제16권6호
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    • pp.153-158
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    • 2007
  • The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

전계방출 주사전자 현미경의 전자광학계 유한요소해석 (Finite Element Analysis for Electron Optical System of a Field Emission SEM)

  • 박근;박만진;김동환;장동영
    • 대한기계학회논문집A
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    • 제30권12호
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    • pp.1557-1563
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    • 2006
  • A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

양극산화 불꽃 방전에 의한 Ti 산화피막의 표면특성 (Characterization of Surface at Ti Oxide Films Converted by Anodic Spark Discharge)

  • 송재주;한병성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.545-546
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    • 2006
  • This study was performed to investigate the surface properties of electrochemically oxidized pure titanium by anodic spark discharging method. Commercially pure titanium plates of $10{\times}20{\times}1[mm]$ in dimensions were polished sequentially emery paper. Anodizing was performed at current density of $76.2\;[mA/cm^2]$, application voltage of 290, 350, 400 [V] using a regulated DC power supply, which allowed automatic transition constant current when a preset maximum voltage has been reached. The Ti surface oxided films was characterized by scanning electron microscope(SEM). The precipitation of HA(Hydroxyapatite) crystals on anodized surface was greatly accelerated by hydrothermal treatment. The concentrations of DL-$\alpha$-Glycerolphosphate Magnesiurn(DL-$\alpha$-GP-Mg) salt and Ca acetate in an electrolyte was highly affected the precipitation of HA crystals converted by Ti Anodized oxide films by Shape of Impulse Voltage.

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경도 변화에 따른 실리콘 고무의 유전 특성에 관한 연구 (A Study on the Dielectric Properties of Silicone Rubber due to Hardness Variation)

  • 이성일
    • 한국전기전자재료학회논문지
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    • 제25권11호
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    • pp.916-921
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    • 2012
  • This research measured the dielectric properties of silicone rubber with various hardness in 100 Hz~3 MHz, $30{\sim}170^{\circ}C$ conditions. When the hardness increases from 65 degree to 75 degree, the dielectric loss increased within frequency range of 100 kHz~3 MHz and was a little change in dielectric loss within temperature range of $90^{\circ}C{\sim}170^{\circ}C$. Thermogravimetric Analysis (TGA) showed the weight change rate increased a little while heated until $800^{\circ}C$. Scanning Electron Microscope (SEM) measurement showed that Aluminium Trihydroxide($AlOH_3$) which acts as a reinforcement agent reduced the size of the particles as the hardness increased.

Friction and Wear of Nano-Sized Silica Filled Epoxy Composites

  • Kim, Jae-Dong;Kim, Yeong-Sik;Kim, Hyung-Jin
    • 동력기계공학회지
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    • 제18권6호
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    • pp.174-179
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    • 2014
  • The wear behavior of epoxy matrix composites filled with nano sized silica particles is discussed in this paper. Especially, the variation of the coefficient of friction and the specific wear rate under the various applied load and sliding velocity were investigated for these materials. Wear tests of pin-on-disc mode were carried out and followed by scanning electron microscope observations. The presence of silica filler in epoxy composites was demonstrated significant influence on the friction and wear behavior of epoxy nanocomposites. With the incorporation of silica filler into the epoxy matrix, reduction of the coefficient of friction and specific wear rate were identified. Wear mechanism was discussed by analyzing the worn surface by scanning electron microscope as well.

전자빔 가공시스템용 진공환경의 성능평가 (Characteristic Evaluation of Vacuum Chamber for EBM System)

  • 강재훈;이찬홍;최종호;임윤빈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.934-937
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    • 2005
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

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SMC 압축성형재의 기계적 물성 및 특성에 관한 연구 (A Study on Material Characterization and Mechanical Properties of SMC Compression Molding Parts)

  • 김기택;임용택
    • 대한기계학회논문집
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    • 제18권9호
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    • pp.2396-2403
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    • 1994
  • An experimental study on material characterization and mechanical properties of SMC(Sheet Molding Compounds) compression method parts was carried out. Simple compression test using grease oil as a lubricant was carried out to characterize flow stress of SMC at elevated temperatures. Two different mold temperatures, $130^{\circ}C{\;}and{\;}150^{\circ}C$ and two different mold speeds, 15, 45 mm/min were used for preparing the specimen of SMC compression molded parts. Surface roughness, tensile, and 3-point bending tests were used to determine the effects of molding temperatures and speeds on mechanical properties of compression molded SMC parts. Orientation and distribution of glass fiber in the compression molded SMC parts were also investigated by photographing the burnt flat specimen and taking SEM(Scanning Electron Microscope) of cross-sectional T-specimen.

Light and Scanning Electron Microscope Observatt-ons on Sexual Dimorphism in Pupa of Mullberry silkworm, bombyx Mori Linn (Lopidoptera : Bombycidae)

  • Kumar, Vineet;Tewari, S.K.;Awasthi, A.K.;Datta, R.K.
    • 한국잠사곤충학회지
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    • 제41권2호
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    • pp.87-93
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    • 1999
  • Under Light and Scanning electron microscope, the pupal morphology of mulberry silkworm Bombyx mori Linn. revealed the prothorax and metathorax, well developed mesothorax, less defined last pair of sporacle, well exposed prothoracic femora and wing pads approaching the anterior margin of Ab III. The important sex separating characters viz, wegiht, antennal elevations, intersegmental lines and genings have discussed. Further, two separate openings bursa copulatrix and ovipositional opening were observed, performing different functions in abult moth.

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Fabrication and Optical Characterization of Colloidal 3-D Photonic Crystals

  • N. Y. Ha;Y. Woo;Park, Byungchoo;J. W. Wu
    • 한국진공학회지
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    • 제12권S1호
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    • pp.15-16
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    • 2003
  • 3-D photonic band-gap structures are fabricated from dielectric colloidal polystyrene beads through a centrifuge method. The fabricated photonic crystals exhibit opalescent colors under white light and show a clear diffraction peak dependent on the incident angle of the light beam. Also the scanning electron microscope image was taken to verify the face-centered cubic crystal structure. Bragg's law and Snell's law are employed to describe the position of angle resolved diffraction peaks. It was shown that the optically deduced effective refractive index and lattice constants were in good agreement with the crystal structure identified by scanning electron microscope.

전자빔 가공기의 지능형 원격 빔 조절 기능의 개발 (Development of Intelligent Remote Beam Control Function in E-Beam Manufacturing System)

  • 임선종;유준
    • 한국공작기계학회논문집
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    • 제15권2호
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    • pp.24-29
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    • 2006
  • The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.