• Title, Summary, Keyword: Thin-film

Search Result 10,798, Processing Time 0.058 seconds

Microstructure and Morphology of Titanium Thin Films Deposited by Using Shadow Effect (그림자효과를 이용하여 증착한 타이타늄 박막의 미세구조 및 형상)

  • Han, Chang-Suk;Jin, Sung-Yooun;Kwon, Hyuk-Ku
    • Korean Journal of Materials Research
    • /
    • v.29 no.11
    • /
    • pp.709-714
    • /
    • 2019
  • In order to observe the microstructure and morphology of porous titanium -oxide thin film, deposition is performed under a higher Ar gas pressure than is used in the general titanium thin film production method. Black titanium thin film is deposited on stainless steel wire and Cu thin plate at a pressure of about 12 Pa, but lustrous thin film is deposited at lower pressure. The black titanium thin film has a larger apparent thickness than that of the glossy thin film. As a result of scanning electron microscope observation, it is seen that the black thin film has an extremely porous structure and consists of a separated column with periodic step differences on the sides. In this configuration, due to the shadowing effect, the nuclei formed on the substrate periodically grow to form a step. The surface area of the black thin film on the Cu thin plate changes with the bias potential. It has been found that the bias of the small negative is effective in increasing the surface area of the black titanium thin film. These results suggest that porous titanium-oxide thin film can be fabricated by applying the appropriate oxidation process to black titanium thin film composed of separated columns.

Preparation of Iron Oxide Thin Films by Vacuum Evaporation Method and Its Electrical Properties (진공증착법에 의한 산화철박막의 제조 및 전기적특성)

  • 조경형;오재희
    • Journal of the Korean Ceramic Society
    • /
    • v.22 no.6
    • /
    • pp.87-93
    • /
    • 1985
  • The hematite the magetite and the maghemite thin film were prepared by oxidation and reductino of the vaccum-evaporated iron thin film. Interre;atoms between film preparation process and the electrical properties were investigated. At room temperature the electrical conductivity of the iron the hematite the magnetite and the maghemite thin film were $1{\times}10^4\Omega^{-1}cm^{-1}$, 2{\times}10^{-5}\Omega^{-1}cm^{-1}$, $3{\times}10^{-5}\Omega^{-1}cm^{-1}$, and $4{\times}10^{-5}\Omega^{-1}cm^{-1}$, resp-ectively. The surface of each thin film was dense and homogeneous. At the temperature that the iron thin film was converted into the hematite thin film the electrical conductivity decreased rapidly and the electrical con-ductivity of the hematite thin film increased as temperature increased. The hematite thin film was reduced to the magnetite thin film in H2 atmosphere. The electrical conductivity decreased rapidly at the temperature that the maghemite thin film is formed by oxidation of the magnetite thin film and the electrical conductivity of the maghemite thin film increased as temperature increased.

  • PDF

Thin Film Morphology Pentacene Thin Film Using Low-Pressure Gas Assisted Organic Vapor Deposition(LP-GAOVD)

  • Ahn, Seong-Deok;Kang, Seung-Youl;Lee, Yong-Eui;Kim, Chul-Am;Joung, Meyong-Ju;Suh, Kyung-Soo
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • /
    • pp.998-1000
    • /
    • 2003
  • We have investigated thin film morphology of pentacene thin films by the process of low-pressure gas assisted organic vapor deposition (LP-GAOVD). Source temperature, inert gas flow rate, substrate temperature and deposition pressure during film deposition is used to vary the growth rate, thin film morphology and the crystalline grain size of pentacene thin films. The electrical properties of pentacene thin films for applications in organic thin film transistor and electrophoretic displays will be discussed.

  • PDF

The influences of film density on hydration of MgO protective layer in plasma display panel

  • Lee, Jung-Heon;Eun, Jae-Hwan;Park, Sun-Young;Kim, Soo-Gil;Kim, Hyeong-Joon
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • /
    • pp.228-231
    • /
    • 2002
  • We report the effect of density of thin films on moisture adsorption and hydration of MgO thin film, usually used as a protective layer in AC-PDP After hydration, lots of hemispherical shaped clusters, $Mg(OH)_2$, formed on the surface of MgO thin films. However clusters formed on low-density thin films were bigger than those on high-density films. From ERD spectra, it seemed that the concentration of hydrogen was very high in the region 20 nm from the surface of MgO thin film. The low-density thin film had more hydrogen than high-density thin film. From simulation results of ERD and RBS it was found that hydration reaction also occurred in the inner part of the film. So diffusion of Mg atoms from the inner part of the film to the surface and $H_2O$ molecules from the surface to the inner part of the film is important. And because low density thin film has many short paths for diffusion of Mg atoms and $H_2O$ molecules, low-density thin film is more hydrated. So to suppress hydration of MgO thin films, high-density thin film is needed.

  • PDF

A Study on the Characteristics of Se/ZnS Thin Film Light Amplifiers

  • Park, Gye-Choon;Chung, Hae-Duck;Lee, Jin;Yang, Hyun-Hun;Jeong, Woon-Jo;Park, Jung-Yun;Lee, Kyung-Sup
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • /
    • pp.13-14
    • /
    • 2004
  • Using Se as a photoconductive element and ZnS as a luminescent element, a Se/ZnS thin film device for light amplifier applications was fabricated and its characteristics were investigated At various conditions of substrate temperatures, heat treatment times, and heat treatment temperatures, Se thin films and ZnS thin films were separately deposited by an EBE(Electron Beam Evaporation) method of an high accuracy in deposition rates and the optimum fabrication conditions for the Se thin film and the ZnS thin film with a hexagonal structure were obtained The Se/ZnS thin film light amplifier was fabricated by evaporating the ZnS thin film on an ITO(Indium Tin Oxide) glass and the Se thin film on the ZnS thin film in sequence.

  • PDF