• Title, Summary, Keyword: Vibratory Gyroscope

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Planar Vibratory Gyroscope using Electrostatic Actuation and Electromagnetic Detection (정전력 구동 및 전자력 검출형 평면 진송 각속도계)

  • 이상훈;임형택;이승기
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1089-1092
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    • 1995
  • A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

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Fabrication of Planar Vibratory Gyroscope Using Electromagnetic Force (전자력을 이용한 평면 진동형 자이로스코프의 제작)

  • Lee, Sang-Hun;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • pp.195-197
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    • 1993
  • In this paper, a planar vibratory gyroscope is designed and fabricated in macro model. Elementary experiment and test are done for micro model. This gyroscope has a double gimbal structure with an active dimension $80{\times}120{\times}1\;mm^3$. Outer gimbal vibration is generated by electromagnetic force using ferrite E-core wounded by coil. Inner gimbal vibration is detected by inductive sensor. It is demonstrated' that mechanical and electrical symmetries are important for improvement of vibratory gyroscope.

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The Implementation and Experiments of Open-Loop Cylindrical Vibratory Gyroscope (개루프 제어의 실린더 진동형 자이로 구현 및 실험)

  • 공형직;김정엽;홍성경
    • Journal of Institute of Control, Robotics and Systems
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    • v.10 no.8
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    • pp.669-672
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    • 2004
  • This paper considers the implementation and experiments of an open-loop Cylindrical Vibratory Gyroscope(CGV). An open-loop CGV composed of thin cylindrical vibrating element, electromagnetic drive and pick-off element with open-loop control was designed and fabricated. The experimental performance tests of the open-loop CGV were done using a temperature chambered rate table. Also, the limitations of open-loop CGV were analyzed and the solution for the limitations was proposed.

A Study on the G-Sensitivity Error of MEMS Vibratory Gyroscopes (진동형 MEMS 자이로스코프 G-민감도 오차에 관한 연구)

  • Park, Byung-Su
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.8
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    • pp.1075-1079
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    • 2014
  • In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

Performance analysis of feedback controller for vibratory gyroscope at various vacuum levels

  • Sung, Woon-Tahk;Lee, Jang-Gyu;Kang, Tae-Sam
    • 제어로봇시스템학회:학술대회논문집
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    • pp.1537-1541
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    • 2003
  • In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

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A Driving and Pick-Off Method of Vibratory Gyroscopes Using Electromagnetic Force (전자기력을 이용한 진동형 자이로스코프의 가진 및 검출 기법 연구)

  • 이정영;홍성경
    • Journal of Institute of Control, Robotics and Systems
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    • v.9 no.1
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    • pp.30-36
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    • 2003
  • Driving and pick-off using electromagnetic force for a cylindrical vibratory gyroscope is considered. A gyroscope consisting of thin cylindrical vibrating element and electromagnetic drive and pick-off element is designed, fabricated and tested. The results of the proposed pick-off method were compared with the results of the highly precise laser interferometer and eddy current sensor as it was used as the reference standard. Through the experiment, it is verified that the proposed electromagnetic driving and pick-off method can be an effective alternative to conventional electrostatic or piezo-electric methods.

A Study on the Optimal Drive Signal Tuning of Vibratory Gyroscope (진동형 각속도계의 최적 구동신호 튜닝에 대한 연구)

  • Lee, June-Young;Jeon, Seung-Hoon;Jung, Hyoung-Kyoon;Chang, Hyun-Kee;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • pp.40-42
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    • 2004
  • This paper describes a method to find an optimal driving condition of vibratory gyroscope. Mechanical coupling between driving and sensing mode degrades the performance of vibratory gyroscope. When the resonant frequencies of driving and sensing parts are fixed, frequency and amplitude of driving source affect mechanical coupling. Thus, they should be optimally tuned. To investigate the influence of driving source on mechanical coupling, we measured frequency response and displacement of driving and sensing mode using laser vibromenter. The measured frequency response and displacement show that the gyroscope has minimum mechanical coupling when the frequency of driving source is set to the intermediate value of driving and sensing part resonant frequency. Measurement also shows that the mechanical coupling increases abruptly at a certain driving voltage as the voltage increases.

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Effects of Package Induced Stress on MEMS Device and Its Improvements (패키징으로 인한 응력이 MEMS 소자에 미치는 영향 분석 및 개선)

  • Choa Sung-Hoon;Cho Yong Chul;Lee Moon Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.11
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    • pp.165-172
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    • 2005
  • In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

Oscillation Control for a Electro-Magnetic Vibratory Gyroscope (전자기력을 이용한 진동형 자이로의 가진루프제어)

  • Kong, Hyeong-Jik;Lee, Sug-Chon;Park, Sung-Su;Hong, Sung-Kyung
    • Journal of Institute of Control, Robotics and Systems
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    • v.11 no.3
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    • pp.187-192
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    • 2005
  • This paper presents the design of the Automatic Gain Control (AGC) system for the drive axis of a electro-magnetic driven cylinder gyroscope. The simulation and experimental results show that the designed AGC excites the cylinder at its natural frequency and maintains a specified amplitude of oscillations, and also track the natural frequency shifts due to temperature variations. The sensing performance of the AGC driven gyroscope is shown to be greatly improved compared to that of the open-loop driven one.

A Study on the Measurement Methodology of Characteristics of the Vibratory Micro Gyroscope Using the Quality factor and the Resonant Displacement (Quality factor 와 공진시 변위 측정을 이용한 진동형 자이로스코프의 특성 평가에 관한 연구)

  • Jeon, Seung-Hoon;Lee, June-Young;Jung, Hyoung-Kyoon;Chang, Hyun-Kee;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • pp.2090-2092
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    • 2004
  • In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.

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