• Title, Summary, Keyword: active Q-switched Nd:YAG laser

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Laser Micro-machining technology for Fabrication of the Micro Thin-Film Inductors (초소형 박막 인덕터 제작을 위한 레이저 미세가공 기술 개발)

  • Ahn, Seong-Joon;Ahn, Seung-Joon;Kim, Dae-Wook;Kim, Ho-Seob;Kim, Cheol-Gi
    • Journal of the Korean Magnetics Society
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    • v.13 no.3
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    • pp.115-120
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    • 2003
  • We have developed laser micro-machining technology for fabrication of the micro thin-film inductors. After the thin layers of FM/M/FM films were coated to the silicon substrate by using the conventional sputtering method, the new laser machining was applied to the patterning process that used to be carried out by the semiconductor lithography procedure. A CW Nd:YAG laser operating in TEM$\sub$00/ mode was actively Q-switched to obtain the very short pulse of 200 ns. The laser micro-machining process with pulse energy and repetition rate have been optimized as 5 mJ/pulse and 5 kHz, respectively, to obtain the line resolution as fine as 20 $\mu\textrm{m}$.

Fabrication of Electrostatic Electron Lens for Electron Beam Microcolumn using the Laser Micromachining (레이저 미세가공 기술을 이용한 초소형 전자빔 장치용 정전장 전자렌즈의 제작)

  • Ahn, Seung-Jun;Kim, Dae-Wook;Kim, Ho-Seop;Kim, Yeong-Jeong;Lee, Yong-San
    • Korean Journal of Materials Research
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    • v.11 no.9
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    • pp.792-796
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    • 2001
  • For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

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