대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

붕소 도핑된 수소화 비정질 실리콘박막의 광도전특성

Photoconductive properties of B-doped hydrogenated amorphous silicon thin films

  • 박욱동 (경북대학교 전기공학과) ;
  • 박기철 (경북대학교 전기공학과) ;
  • 박창배 (경북대학교 전기공학과) ;
  • 김기완 (경북대학교 전기공학과)
  • Park, Wug-Dong (Dept. of Electronics, Kyoungpook National University) ;
  • Park, Ki-Chul (Dept. of Electronics, Kyoungpook National University) ;
  • Park, Chang-Bae (Dept. of Electronics, Kyoungpook National University) ;
  • Kim, Ki-Wan (Dept. of Electronics, Kyoungpook National University)
  • 발행 : 1987.07.03
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Photoconductive properties of B-doped hydrogenated amorphous silicon thin films prepared by the RF glow discharge decomposition of $SiH_4-B_2H_6$ gas mixtures have been investigated. Experimental results showed that the B-doped hydrogenated amorphous silicon thin films have high photosensitivity and good optical absorption. Therefore these thin films can be used for the photoconductive layer of the vidicon target.

키워드