Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.11a
- /
- Pages.151-154
- /
- 1989
The characteristic of the elcetrostatic probe surface heated with current
가열식(加熱式) 정전탐침전극(靜電探針電極)의 표면특성(表面特性)
- Kwak, Y.S. (Pusan National University) ;
-
Cho, J.S.
(Pusan National University)
;
-
Park, C.H.
(Pusan National University)
;
- Kim, K.H. (Pusan National University) ;
- Kim, S.P. (Pusan National University) ;
- Kim, D.H. (Pusan National University)
- Published : 1989.11.25
Abstract
In the measurement of plasma parameters of the plasma C.V.D with probe method, the most important problem is the contamination of the probe surface. In this paper, we observe the surface contamination of probe surface with microscope and determine the critical current and the critical time to sustain the clean surface of probe in the plasma C.V.D.
Keywords