Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Influence of $CO_2$ Gas in Plasma Polymerized thin films

$CO_2$케리어 가스가 플라즈마 종합막에 미치는 영향

  • Published : 1990.10.01

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Abstract

In this study, we prepared plasma polymerized thin films as changing the composition rate of the Ar/CO$_2$, 0 to 100%, for analysing the influence of CO$_2$ gas in plasma polymerization. Power source was the RF frequence (13.56MHz), the monomers were styrene and MMA (Methyl-methacrylate), and substrates were glass and KBr(or NaCl) for IR spectroscopy. The molecular structure of plasma polymerized organic thin films was examined by IR, FT-IR, Gas chromatography and so forth.

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