유기 화합물을 이용한 MPECVD에 의한 다이아몬드 박막 합성

The Synthesis of Diamond Thin Films by MPECVD Using Organic Compounds

Diamond thin films were synthesized by the MPECVD (Microwave Enhanced Chemical Deposition) using the mixture of the hydrogen and organic compounds($CH_3COCH_3$, $CH_3OH$). In X-ray Diffraction, the d values of all the deposits on the Si substrates with the experimental conditions coincide with those of natural diamond in POD (Powder Diffraction Data). The changes of the morphology of all the deposits were examined by SEM. The amount of amorphous carbon or graphite in the diamond films were increased as the acetone concentration was increased. The morphology of the diamond particles can be changed from ball-like to euhedral by adding the small amount of the methanol in the reaction gases of the high acetone concentration.