Ne-Ne 레이저의 간섭을 이용한 고정밀 리니어 스케일의 제작에 관한 연구

A study on the Manufactiring of High-Precision Linear Scale by the Use of He-Ne Laser Interference Of late, along with the advancement of procision machining technology, the reauirement of super-precision measurement increases as time goes on, and the precision and accuracy of standard scale which is a basis of procision measurement has been cognized as a oriterion of industrial development in a nation. Up to now, mechanical and chemical methods have been widely employed to carve scale lines on linear scale, and it is impossible for the linear scale manufactured by means of those methods to guarantee the measurement with sub-micron level owing to errors attended with various problems. And the measuring length also bears errors subjected to the influence of surroundings condition, and shows inefficient circumstances in measurement on the ground of the complexity of measuring procedure as well as massive measuring apparatus. Hence in this paper, we described on technology by which we can carve scale lines thru optical method under the condition of laboratory by using rhcoherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurment of lengrh. In this researchin the case of setting scale interval to 20 .mu. m, we employed super-precision scale-carving device associated by Ar larser and acoustic optical modulator in lieu of flsahing lamp scale-carving device, and we consequently obtained superior linear scales carved with precision and accuracy of .+-. 0.3 .mu. m.