Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1991.11a
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- Pages.419-422
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- 1991
A Study on the Characteristics of the Inductively Coupled thermal Plasma
유도 결합형 열 플라즈마의 특성 연구
- Sin, H.M. (SNU. Dept. of Electrical Eng.) ;
-
Choi, K.C.
(SNU. Dept. of Electrical Eng.)
;
- Kim, W.K. (SNU. Dept. of Electrical Eng.) ;
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Whang, K.W.
(SNU. Dept. of Electrical Eng.)
- Published : 1991.11.22
Abstract
A mathematical model was developed to predict the temperature, the density, and the velocity distribution of an inductively coupled thermal plasma. It was for an atmospheric pressure argon thermal plasma generated by a 4 MHz radio frequency power. It has been shown that the hottest region can be moved toward centrial region by applying an external magnetic field. Based on the results of the simulation. an ICP(Inductively Coupled thermal Plasma) system was constructed and thermal plasma was generated.
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