An Auto-focusing system for a Iligh Resoulution Microscope

고배율 현미경의 자동초점장치

This study proposed a new autofocusing method for a high resolution microscope with a depth of focus of a submicron range. The experimental setup was characterized by nulling method for bi-cell prhotodiode which had two active areas on sensor surface. The optical systems used in this method had was very simple and was easily matched to microscopes which had used widely. It was shown that the resolution was very high (about 20 nm) by experimental results. This method can be used in the semiconduct industry because it can find defects on the silcon wafer.