Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Chemical and Electrical ppropperties of ppolyimide Thin Film Fabricated by Ionized Cluster Beam

  • Lee, Y.S. (Dept. of Physics, Yonsei University) ;
  • Kim, K.W. (Dept. of Physics, Yonsei University) ;
  • Park, S.C. (Dept. of Physics, Yonsei University) ;
  • Park, I.S. (Dept. of Physics, Yonsei University) ;
  • Cho, S.J. (Dept. of Physics, Yonsei University) ;
  • Whang, C.N. (Dept. of Physics, Yonsei University)
  • Published : 1993.07.01
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