Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.07a
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- Pages.87-88
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- 1993
Electrical resistance ppropperties of (TaO$_x$ /TaN$_{0.1}$ /Cr/Al$_2$ O$_3$ (Bulk) thin films for supper pprecision and high resistance
고정밀, 고저항 Resistor용 TaO$_x$ /TaN$_{0.1}$ /Cr/Al$_2$ O$_3$ (Bulk) 박막의 저항 특성에 관한 연구
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