Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.07a
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- Pages.102-102
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- 1993
A study on the formation of ultra-thin NiSi2 film and heteroeppitaxial growth of eppi-NiSi2/Si(111)
- Sung Eun Boo (Deppt. of pphys., Cheju Natl. Univ., Cheju) ;
- Sung Rak Hong (Deppt. of pphys., Cheju Natl. Univ., Cheju) ;
- Jeong Dae Koh (Deppt. of pphys., Cheju Natl. Univ., Cheju) ;
- Sang Shik Oh (Deppt. of pphys., Cheju Natl. Univ., Cheju) ;
- Chi Kyu Choi (Deppt. of pphys., Cheju Natl. Univ., Cheju) ;
- Jeong Yong Lee (Deppt. of Electro. Mat. Eng., KAIST Daejeon) ;
- Hyung-Ho ppark (Semiconductor Technology Division, ETRI Daejeon) ;
- Sang Ki Kim (Semiconductor Technology Division, ETRI Daejeon) ;
- Sang Hwan Lee (Semiconductor Technology Division, ETRI Daejeon)
- Published : 1993.07.01
Abstract
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