한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1993년도 추계학술대회 논문집
- /
- Pages.128-130
- /
- 1993
대향전극 스퍼트 시스템의 방전특성에 관한 연구
A Study on the Discharge Characteristics of Facing Taget Sputtering System
초록
This paper presents the discharge characteristics of FTS system under verious discharge condition. E1ectron temperature and electron density are studied by double probe method. The Characteristics of discharge occurrence vol-tage and discharge current are significantly affected by magnetic flux density. And the best TiN thin film is obtained at 700[Vl, 400[gauss] and 1.0[mtorr].
키워드