Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Semiconductor Flow Sensor To Detect Air flow

유속감지를 위한 반도체 유량센서

  • Yee, young-Joo (Dep. of Electronic Engineering, Seoul National University and Inter-university Semiconductor Research Center) ;
  • Chun, Kuk-Jin (Dep. of Electronic Engineering, Seoul National University and Inter-university Semiconductor Research Center)
  • 이영주 (서울대학교 전자공학과, 반도체 공동연구소) ;
  • 전국진 (서울대학교 전자공학과, 반도체 공동연구소)
  • Published : 1993.11.26
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Abstract

Silicon flow sensor which can detect the magnitude and direction of two dimensional air flow was designed and fabricated by CMOS process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm a heater at the center of the diaphragm and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity due to excellent thermal isolation property of dielectric materials and its tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the given structure. Measured sensitivity of our sensor is $18.7mV/(m/s)^{1/2}$.

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