A Fabrication and Experiment of Induction-type EHD Micropump with Temperature Gradient

온도차를 이용한 유도형 마이크로 EHD 펌프의 제작 및 실험

  • Youn, Yong-Kyu (Department of Electrical Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (Department of Electrical Engineering, Seoul National University)
  • Published : 1993.11.26

Abstract

This paper represents the experimental results of electrohrdrodynamic(EHD) micropump driven by traveling- wave voltage. We fabricated 60 electrodes array with $100{\mu}m$ width and $100{\mu}m$ interval on the pyrex glass. On that glass we fabricated the micro channel which had the cross section of 3mm by 0.5mm. This pump was driven by 6 phase square traveling-wave voltage. We used the corn oil for experiments and increased the temperature of fluid by resistive heater. An optical microscope with CCD camera and monitor was used for observation. The fluid velocity was large for the large driving voltage and the high temperature. This EHD pump had the fluid velocity in specific frequency (near 1Hz) which had relation to the charge relaxation time in that oil.

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