Nondestructive and Quantitative Depthprofiling Analysis of Ion Bombarded Surfaces by Medium Energy Ion Scattering Spectroscopy

  • Lee, J.C. (Deppartment of Physics, Chungbuk University) ;
  • Kim, H.K. (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
  • Kang, H.J. (Deppartment of Physics, Chungbuk University) ;
  • Moon, D.W. (Surface Analysis Groupp, Korea Research Institute of Standards and Science)
  • Published : 1994.06.01