Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

A study on the Discharge Characteristics of Facing Targets Sputtering Systems and Fabrications of $Al_{N}$ Thin Films

대향전극 스파트링 시스템의 방전특성과 $Al_{N}$ 박막형성에 관한 연구

  • 이종호 (울산대학교 공과대학 전기공학과) ;
  • 이규철 (울산대학교 공과대학 전기공학과) ;
  • 남용수 (울산대학교 공과대학 전기공학과) ;
  • 김경석 (울산대학교 공과대학 전기공학과)
  • Published : 1994.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper we have investigated discharge conditions(parameters of this experiment) in facing targets sputtering system and fabricated $Al_{N}$ thin films. The parameters of this study are diameter of wing(d) and distance(L) between two facing targets. Varing discharge conditions, the discharge characteristics are wide different. The optimal conditions in this experiments are d = 6.5 [cm], L = 6.5[cm]

Keywords