평판형유도결합플라즈마의 임피던스특성 측정 및 수치해석

Measurement and Numerical Analysis of Impedance Characteristics of Planar ICP

The impedance characteristics of planar ICP have been measured and compared with the theoretical results obtained by the field equation. The resistance of the total impedance had a maximum point and the inductance decreased monotonically as the electron density increased from $2.5{\times}10^{10}cm^{-3}$ to $7{\times}10^{11}cm^{-3}$ and the Pressure from 1mT to 50mT. The impedance characteristics were also dependent on the profile of the electron density. The effective collision frequency, ${\nu}_{eff}$ was $9.0{\times}10^6Hz$ at 5mT and $.5{\times}10^7Hz$ at 100mT. The effective collision frequency at 5mT was not so different from that at 100mT and it is doe to the reduction of the discharge channel cross-section at high pressure. The estimated effective collision frequency from the simulation data was of the same order as the measured one.