대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

$p^+$ 컨틸레버 빔을 이용한 다결정 실리론 압저항 가속도계의 제작

Fabrication of a Polysilicon Piezoresistive Accelerometer Using $p^+$ Cantilever Beams

  • 지영훈 (아주대학교 제어계측공학과) ;
  • 양의혁 (아주대학교 제어계측공학과) ;
  • 양상식 (아주대학교 제어계측공학과)
  • Ji, Y.H. (Department of Control and Instrumentation Engineering AJOU University) ;
  • Yang, E.H. (Department of Control and Instrumentation Engineering AJOU University) ;
  • Yang, S.S. (Department of Control and Instrumentation Engineering AJOU University)
  • 발행 : 1994.11.18
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초록

In this study, a silicon piezoresistive accelerometer is designed and fabricated using $p^+$ etch stop layer. The accelerometer consists of a seismic mass and tour cantilevers, and is fabricated mainly by the anisotropic etching method using EPW as an etchant. Eight piezoresistors are properly arranged and connected to make a bridge circuit so that acceleration in only one direction may be measured. The etch stop method is adequate to the mass-production and the precise thickness control of the diaphragms as well, whet compared with the electrochemecal etch stop method.

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