Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Electrical properties of Al/TiN/Ti Contact at Submicron contact(1)

Al/TiN/Ti 전극의 Submicron contact에서의 전기적특성(1)

  • Lee, Cheol-Jin (Department of Electrical Engineering Kunsan National Univ.) ;
  • Eom, Moon-Jong (Department of Electrical Engineering Kunsan National Univ.) ;
  • Ra, Yong-Choon (Department of Electrical Engineering Kunsan National Univ.) ;
  • Sung, Man-Young (Department of Electrical Engineering Korea Univ.) ;
  • Sung, Yung-Kwon (Department of Electrical Engineering Korea Univ.)
  • Published : 1995.07.20
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Abstract

The electrical properties of Al/TiN/Ti contact according to post anneal ins conditions are investigated at submicron contacts. $N^+$ contact resistance increases with increasing alloy temperature while $P^+$ contact resistance slightly decreases. The contact tentage current increases wi th increasing alloy temperature for both $N^+$ and $P^+$ contacts. The contact resistance and leakage current of $N^+$ contact increases with increasing alloy tide. $P^+$ contact resistance decreases with increasing alloy time but $P^+$ contact tentage current increases. The contact resistance and contact leakage current increases with increasing alloy cycles for both $N^+$ and $P^+$ contacts.

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