Fault tolerant supervisory control system and automated failure diagnosis

We proposed in this paper a systematic way for analyzing discrete event dynamic systems to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in the system. An automated failure diagnosis scheme with respect to the nominal normal operating event sequences and the supervisory control problem for tolerable fault event sequences is presented. Moreover the supervisor failure diagnosis problem with respect to the tolerable fault event sequences is considered. Finally, a plasma etching system example is presented.