Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 1995.10a
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- Pages.75-78
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- 1995
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- 2005-8446(pISSN)
Laser application in 3-D micromachining
레이져를 이용한 3차원 형상가공에 관한 연구
Abstract
This paper presents the feasibility of laser ablation process in 3-D micro machining of MEMS (micro Electro Mechanical System)parts. The micro machining characteristics of polymer(Energy fluence, pulse repetition rate, number of pulse, ablation rate)are investigated and 3-D micro machined samples are demonstrated.
Keywords