Effects of Geometric Errors on the Measurement of Error Motions of Rotor with the Cylindrical Capacitive Displacement Sensor

형상오차가 원통형 정전용량 변위센서의 축 회전오차의 측정에 미치는 영향

This paper discisses the effects geometric errors on the measurement of error motions of rotor with the cylindrical capacitive displacement sensor. Analytic model of the measuring process with this sensor is derived and this model shows that the effect of geometric errors of sensor is larger than that of rator on the measurement of error motions of rotor. The computer simulation shows effect of periodic errors in this sensor on the measuring orbit.