The Dynamic Characteristics of an Electrostatic Plate Resonator

전전형 평판 공진자의 동특성

In this paper, an electrostatic plate resonator with four corrugated bridges and another with four flat ones have been fabricated and tested by the electrostatic actuation. The resonators consist of one rigid plate and four bridges. Boron diffusion process and anisotropic etch process with EPW are mainly used to fabricate the resonators. The dynamic characteristics of the fabricated resonators are obtained by measuring the velocity of the center of the rigid plate using a laser vibrometer. The results show that the deflection of the resonator with the corrugated bridges is larger than the resonator with the flat ones. It has been confirmed that the corrugated structure releases the residual tensile stress in the bridges resulted from the diffusion process.