Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.101-101
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- 1995
Plasma Source Ion Implantation - A Three Dimensional Ion Implantation Technique
- Han, Seung-hee (Advanced Analysis Center, Korea Institute of Science and Technology Deppartment of Chemistry, Kyunghee University) ;
- Kim, Hai-Dong (Advanced Analysis Center, Korea Institute of Science and Technology Deppartment of Chemistry, Kyunghee University) ;
- Lee, Yeon-Hee (Advanced Analysis Center, Korea Institute of Science and Technology Deppartment of Chemistry, Kyunghee University) ;
- Lee, Jung-ye (Advanced Analysis Center, Korea Institute of Science and Technology Deppartment of Chemistry, Kyunghee University)
- Published : 1995.06.01
Abstract
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