Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication of $La_2Ti_2O_{7}$ Film by Metalorganic Deposition

금속유기물증착법에 의한 $La_2Ti_2O_{7}$ 박막의 제조

  • 조경호 (영남대학교 전자공학과) ;
  • 우동찬 (영남대학교 무기재료공학과) ;
  • 박철우 (영남대학교 무기재료공학과) ;
  • 이희영 (영남대학교 무기재료공학과) ;
  • 남효덕 (영남대학교 전자공학과)
  • Published : 1995.11.01
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Abstract

Using metalorganic deposition technique, $La_2Ti_2O_{7}$ precursor solution was deposited on platinium coated SiO$_2$/SI(100) substrates by spin-coating process. Crystalline and crack-free films of ∼0.2$\mu\textrm{m}$ thickness were successfully fabricated on the above substrate from four different types of $La_2Ti_2O_{7}$ precursor solutions by proper heat treatment in the temperature range of $700^{\circ}C$∼$1200^{\circ}C$. Microstructure and X-ray diffraction analysis of $La_2Ti_2O_{7}$ thin film showed that the crystallization temperature and the preferred orientation of $La_2Ti_2O_{7}$ thin film were strongly dependent on the precursor used.

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