한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

VDPM을 이용한 PMBA/4,4-DDE polyimide의 제작과 전기적특성

Fabrication and Electric characteristics of PMDA/4,4-DDE Polyimide by Vapor Deposition Polymerization(VDP) Method

  • 김형권 (인하대학교 전기공학과) ;
  • 우호환 (인하공업전문대학 전기과) ;
  • 김종석 (대전산업대학 전기공학과) ;
  • 한상옥 (충남대학교 전기공학과) ;
  • 이덕출 (인하대학교 전기공학과)
  • 발행 : 1995.11.01
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초록

Polyimide(PI) thin films are fabricated by vapor deposition polymerization(VDP) from PMDA and DDE. The IR spectrum show that PAA the films are changed into PI films by curing. The activation energy of PI films is estimated to be 0.32 [eV] at the electric field of 0.133 [Mv/cm]. The resistivity is about 4.5${\times}$10$\_$16/ [$\Omega$$.$cm] at room temperature.

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