Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1995.11a
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- Pages.253-256
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- 1995
Review on Post-Processing of Diamond Thin Film Semiconductor
박막 다이아몬드 필름의 후처리 공정법에 대한 고찰
Abstract
This paper reviewed the methods about cost-processing of diamond stone and thin film. Five different crises of annealing conditions have been discussed with the electrical properties of doping and implantation.
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