Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 1995.05a
  • /
  • Pages.102-103
  • /
  • 1995
  • /
  • 2233-9485(pISSN)
  • /
  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
권호 표지

A study of reactive Ion etching of Titanium for thin film head fabrication

박막 헤드 제조를 위한 Titanium 금속 mask의 반응성 이온 식각에 관한 연구

  • Yoon, S.H. (Samsung Advanced Institute of Technology) ;
  • Choi, H.S. (Samsung Advanced Institute of Technology) ;
  • Park, D.Y. (Samsung Advanced Institute of Technology) ;
  • Kim, I.E. (Samsung Advanced Institute of Technology)
  • Published : 1995.05.01
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Abstract

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