대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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- Pages.326-328
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- 1995
초고진공 전자공명 플라즈마를 이용한 SiC buffer layer 형성에 관한 연구
A Study on SiC Buffer Layer Prepared by Ultra High Vacuum Electron Cyclotron Resonance CVD
- Joen, Woo-Gon (Dep. of Electrical Engineering, Seoul National University) ;
- Pyo, Jae-Hwak (Dep. of Electrical Engineering, Seoul National University) ;
- Whang, Ki-Woong (Dep. of Electrical Engineering, Seoul National University)
- 발행 : 1995.11.18
초록
SiC buffer layers were grown on Si(100) substrates by ultra-high-vacuum electron cryclotron resonance plasma (UHV ECR plasma) from
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