입력주파수 변화특성을 고려한 압전구동기의 정밀위치제어

Precise position control of piezoelectric actuators considering input frequency variance

Piezoelectric actuator is widely used in precision positioning applications due to its excellent positioning resolution. However, serious hysteresis nonlinearity of the actuator deteriorates its precise positioning capability. Evenworse, its hysteresis nonlinearity changes as the actuator input frequency varies. In this study, a simple feedforward scheme is proposed and tested through experiments for precision position control when the variance of the system input frequency is significant.