광조형을 이용한 마이크로가공에 관한 기초적인 연구

Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main way to manufacture micromachine in the past. Because these processing method was 2.5-dimensional, there was the limit in processing perfect three-dimensional micromachine. In this study, we developed the rapid prototyping system for micromachine and tested its property. We also realized .mu. m - order processing and three-dimensional structure processing. The results showed the possibility of manufacturing micromachine with the rapid prototyping system