Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.94-94
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- 1996
A Study on the Bonding Behaviors of Cu Thin Film on the AIN Substrate Treated by Ar Ion-beam in Reactive Gas Environment
Ar 이온빔으로 처리된 AIN 기판과 Cu 박막간의 접합거동에 관한 연구
Abstract
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