Investigation of low energy e-beam from STM aligned field emission(SAFE) microcolmn system

  • Park, Jeong-Young (Department of Physics, Seoul National University) ;
  • Choi, Ho-jin (Department of Physics, Seoul National University) ;
  • Lee, Yongjae (Department of Electronics Engineering, Seoul National University) ;
  • Kang, Seokho (Department of Electronics Engineering, Seoul National University) ;
  • Chun, Kukjin (Department of Electronics Engineering, Seoul National University) ;
  • Kuk, Young (Department of Physics, Seoul National University)
  • Published : 1996.02.01