고주파에서 방향성결합형 광 스위치의 출력 특성변화

Characterization of directional coupling optical switch at High frequency

Directional coupling optical switch which on the LiNbO$_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on LiNbO$_3$ substrate. The annealing at 400[$^{\circ}C$] was caroled out to control waveguide width and depth. The process of proton exchange was done at 150[$^{\circ}C$] for 120[min], 200[$^{\circ}C$] for 60[min] and annealing process was done at 400[$^{\circ}C$] for 90[min], 400[$^{\circ}C$] for 60[min]. The high speed directional coupling optical switch has very good figures of merits:the measured high frequency power were achieved.