LB 초박막 커패시터의 제작 및 특성 (II)

Fabrication and Characteristics of LB Ultra-thin Film Capacitor (II)

  • 유승엽 (동아대학교 공과대학 전기공학과) ;
  • 박재철 (영진전문대학 전자파) ;
  • 권영수 (동아대학교 공과대학 전기공학과)
  • 발행 : 1996.05.01

초록

We had experiment using LB method that can fabricate molecular order ultra-thin film below 100${\AA}$. LB method has known as main technology of information society in 21C, because it is not only free orientation and alignment of molecular but also ability of thickness control as molecular order. In this paper, the fabricated condition and physical properties of functional ultra-thin film of molecular order was investigated and highly efficient ultra-thin film capacitor was fabricated by using ultra-thin LB film for application as electronic device. Possibility of ultra-thin film capacitor was researched by analyzing and measuring electrical properties. Polyimide ultra-thin LB film capacitor was fabricated, ensured theoretically and experimentally its possibility in range of 10Hz∼lMHz through its frequency characteristics.

키워드