한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

ZnO 압전변환기의 주파수특성에 관한 연구

A Study on the frequency characteristic of ZnO Piezoelectric transducers

  • 정규원 (성균관대학교 전기공학과) ;
  • 이종덕 (서남대학교 전기공학과) ;
  • 정광천 (성균관대학교 전기공학과) ;
  • 박상만 (서남대학교 전기공학과) ;
  • 송준태 (성균관대학교 전기공학과)
  • 발행 : 1996.05.01
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초록

In this paper ZnO Piezoelectric transducers were fabricated as follows, counter electrode (pt 99.9%) was deposited on the sapphire substrates by DC sputter method, and then piezoelectric layer (ZnO 99.999%) was deposited on the counter electrode according to the sputtering parameters, and then top electrode (pt 99.9%) was deposited on the piezoelectric layer by Electron Beam Gun Evaporator. Structural characteristic of deposited ZnO thin film was measured by XRD, SEM. Also, Frequency characteristic of ZnO transducer was analyzed theoretically and practically for input frequencies.

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