The Interfacial Segregation of Elemental Ag in the Sputter-Deposited AgInSbTe Thin Films

스퍼터 증착시킨 AgInSbTe 박막에서 Ag의 계면편석

  • Choi, Woo-S. (Devices & Materials Research Lab.,LG Electronics Research Center) ;
  • Kim, Myong-R. (Devices & Materials Research Lab.,LG Electronics Research Center) ;
  • Seo, Hun (Devices & Materials Research Lab.,LG Electronics Research Center) ;
  • Park, Jeong-W. (Devices & Materials Research Lab.,LG Electronics Research Center)
  • Published : 1996.05.01

Abstract

The elemental segregation in the sputter-deposited AgInSbTe recording thin films was studied by means of Auger electron spectroscopy and ESCA for the specimens of as-deposited and as heat-treated conditions. Auger electron spectroscopy and ESCA revealed an extremely thin layer of elemental inhomogeneity, especially for the silver, even in as-deposited condition. The chemical analysis results obtained in this alloy system are discussed in terms of process parameters and target microstructure.

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