Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1996.05a
- /
- Pages.146-149
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- 1996
The Optical Properties of Tetramethyldisiloxane Plasma Polymerization Thin Films
Tetramethyldisiloxane 플라즈마 중합막의 광학특성
- Choi, Chung-Seog (Dept. of Elec. Eng., Inha Univ.) ;
-
Park, Bok-Kee
(Dept. of Elec. Eng., Chonbuk Sanup Univ.)
;
- Kim, Doo-Seog (Dept. of Elec. Eng., Chonbuk Sanup Univ.) ;
-
Lee, Jin
(Dept. of Elec. Eng., Mokpo Univ.)
;
- Lee, Duck-Chool (Dept. of Elec. Eng., Inha Univ.)
- Published : 1996.05.01
Abstract
Polymerization rate, transmittance, refractive index, and extinction coefficient of plasma polymerized tetramethydisiloxane (TMD) have been investigated. The rate of polymerization of TMD films increased nonlinearly with the discharge lower. The refractive indices of thin films varied from 1.40 to 1.43 and they also increased with increasing discharge power. Also, the extinction coefficient was about 0.2 and is independent of photon energy.
Keywords