한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

X-ray Diffraction Analysis of Ag-In-Sb-Te

  • Park, Jeong W. (Devices & Materials Lab, LG Electronics Research Center) ;
  • Hun. Seo (Devices & Materials Lab, LG Electronics Research Center) ;
  • Kim, Myong R. (Devices & Materials Lab, LG Electronics Research Center) ;
  • Park, Woo S. (Devices & Materials Lab, LG Electronics Research Center)
  • 발행 : 1996.05.01
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초록

The x-ray diffraction experiments were carried out to investigate the phase transformation of the sputter-deposited Ag-In-Sb-Te optical thin films after rapid thermal annealing and while being annealed with high-temperature x-ray attachment. The formation mechanism of the reported mixed phase, with both amorphous phase and fine crystalline AgSbTe2 phase, of Ag-In-Sb-Te system in its ordered state was explained. Moreover the characteristics of the other phases which appear during the annealing processes were also discussed in the present article.

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