Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
권호 표지

A Study on the Characteristics of the Radio-Frequency Inductive Discharge Plasma

고주파 유도방전 플라즈마 특성에 관한 연구( I )

  • 박성근 (영남대학교 전기공학과) ;
  • 박상윤 (영남대학교 전기공학과) ;
  • 박원주 (영남대학교 전기공학과) ;
  • 이광식 (영남대학교 전기공학과) ;
  • 이동인 (영남대학교 전기공학과)
  • Published : 1996.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

Electron temperature and electron density were measured in a radio-frequency(rf) inductively coupled plasma using probe measurements. Measurements were made in an argon discharge for pressures from 10 to 100mTorr and input rf power from 100 to 800W. Spatial distribution Electron temperature and electron density were measured for discharge with same aspect ratio. Electron temperature and Electron density were found to depend on both pressure and power. Electron density was creased with increasing pressure, but peaked in a 70mTorr discharge. Radial distribution of the electron density was peaked in the plasma fringes. These results were compared to a simple model of inductively coupled plasmas.

Keywords