비선형 히스테레시스 모델을 채용하지 않는 압전구동기의 정밀위치제어

Precise Position Control of Piezoelectric Actuators without Nonlinear Hysteresis Model

Piezoelectric actuator is widely used in precision positioning applications due to its excellent positioning resolution. However, serious hysteresis nonlinearity of the actuator deteriorates its open loop positioning capability. Generally, a nonlinear hysteresis model is used in feedforward loop to improve positioning accuracy. In this study, however, a simple lead compensator is proposed as a substitution for a complex nonlinear hysteresis model and tested through experiments for precision position control.