피에조일렉트릭 액츄에이터의 히스테리시스 보상 제어

Hysteresis Compensation Control of Piezoelectric Actuators

Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. In this study a digital tracking control approach for a piezoelectric actuator based on incorporating a feedback linearization loop with a PID feedback controller is presented. The hysteresis nonlinearity of the piezoelectric actuator is modeled in the feedback compensation loop using the Maxwell slip model. Experiments were performed on a piezoelectric 2-axis linear positioner for tracking linearly decaying sinusoidal waveforms and circles. The experimental results show that the tracking control performance is noticeably improved by augmenting the feedback loop with a model of hysteresis in the feedback compensation loop.